Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139188 | Gas supply device, method for controlling gas supply device, load port, and semiconductor manufacturing apparatus | Yasushi Taniyama | 2021-10-05 |
| 10923377 | Load port and method of detecting abnormality in FOUP lid of load port | — | 2021-02-16 |
| 9916997 | End structure of nozzle, purging device, and load port | Yuki Matsumoto, Mitsuo Natsume | 2018-03-13 |
| 9239228 | Wafer mapping apparatus and load port including same | Mitsuo Natsume, Masahiro Osawa, Mitsutoshi Ochiai | 2016-01-19 |