Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727100 | Load port and EFEM | Takaaki Nakano | 2020-07-28 |
| 10340168 | Load port and EFEM | Takaaki Nakano | 2019-07-02 |
| 9685359 | Load port device | Manabu Funato, Mitsuo Natsume | 2017-06-20 |
| 9239228 | Wafer mapping apparatus and load port including same | Mitsuo Natsume, Masahiro Osawa, Toshimitsu Morihana | 2016-01-19 |
| 9230844 | Carrier transfer facilitating device | Takumi Mizokawa | 2016-01-05 |
| 8596312 | Gas charging apparatus, gas discharging apparatus, gas charging method, and gas discharging method | Mitsuo Natsume, Takumi Mizokawa | 2013-12-03 |
| 8348584 | Conveyer system | Takumi Mizokawa | 2013-01-08 |