Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662373 | Substrate storage container management system, load port, and substrate storage container management method | Izumi Ito | 2023-05-30 |
| 11658047 | Exhaust nozzle unit, load port, and EFEM | Atsushi Suzuki, Yasushi Taniyama | 2023-05-23 |
| 11348814 | Transfer abnormality detection system and transfer abnormality detection method | Izumi Ito | 2022-05-31 |
| 10978325 | Substrate storage container management system, load port, and substrate storage container management method | Izumi Ito | 2021-04-13 |
| 9939717 | Projector and control method for projector | Takaaki Ozawa | 2018-04-10 |
| 8436373 | Light emitting diode with a light source suitable structure | Tsunehiro Unno | 2013-05-07 |
| 8426884 | Light emitting diode with supporting substrate side electrodes and wiring structures | Tsunehiro Unno | 2013-04-23 |