Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662373 | Substrate storage container management system, load port, and substrate storage container management method | Tomoya Mizutani | 2023-05-30 |
| 11348814 | Transfer abnormality detection system and transfer abnormality detection method | Tomoya Mizutani | 2022-05-31 |
| 10978325 | Substrate storage container management system, load port, and substrate storage container management method | Tomoya Mizutani | 2021-04-13 |