Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8540473 | Load port | Yasushi Taniyama | 2013-09-24 |
| 8423173 | Load port apparatus, lid member mounting and dismounting apparatus for load port apparatus, and controlling method for lifting mechanisms of mapping apparatus | Kensuke Suzuki, Yuuki Taira | 2013-04-16 |
| 7596425 | Substrate detecting apparatus and method, substrate transporting apparatus and method, and substrate processing apparatus and method | — | 2009-09-29 |
| 6712579 | Substrate transfer apparatus and substrate transfer method | Kenji Fujii, Ryuichi Hayama, Tomoyuki Komura | 2004-03-30 |