Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7629033 | Plasma processing method for forming a silicon nitride film on a silicon oxide film | Toshiaki Hongo | 2009-12-08 |
| 7393172 | Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer device | Hiroaki Saeki, Masaki Narushima, Yasushi Taniyama, Shuuji Hagiwara | 2008-07-01 |
| 6797111 | Plasma processing apparatus | Toshiaki Hongoh | 2004-09-28 |
| 6675737 | Plasma processing apparatus | Toshiaki Hongoh, Masaki Hirayama, Tadahiro Ohmi | 2004-01-13 |
| 6656322 | Plasma processing apparatus | Toshiaki Hongo | 2003-12-02 |
| 6510365 | Carrier system positioning method | Yasuhiko Nishinakayama, Shigeru Ishizawa, Hiroaki Saeki, Takashi Kawano | 2003-01-21 |
| 6372084 | Plasma processing apparatus with a dielectric plate having a thickness based on a wavelength of a microwave introduced into a process chamber through the dielectric plate | Toshiaki Hongo | 2002-04-16 |
| 6259061 | Vertical-heat-treatment apparatus with movable lid and compensation heater movable therewith | — | 2001-07-10 |
| 6123429 | Light source device | — | 2000-09-26 |
| 6080965 | Single-substrate-heat-treatment apparatus in semiconductor processing system | — | 2000-06-27 |
| 5820367 | Boat for heat treatment | — | 1998-10-13 |
| 5357115 | Processing method for wafers | Teruo Asakawa, Noboru Hosaka | 1994-10-18 |
| 5248886 | Processing system | Teruo Asakawa, Noboru Hosaka | 1993-09-28 |