Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8092642 | Plasma processing apparatus | Masaki Hirayama, Tadahiro Ohmi | 2012-01-10 |
| 7629033 | Plasma processing method for forming a silicon nitride film on a silicon oxide film | Tetsu Osawa | 2009-12-08 |
| 6729261 | Plasma processing apparatus | — | 2004-05-04 |
| 6656322 | Plasma processing apparatus | Tetsu Osawa | 2003-12-02 |
| 6428661 | Plating apparatus | — | 2002-08-06 |
| 6372084 | Plasma processing apparatus with a dielectric plate having a thickness based on a wavelength of a microwave introduced into a process chamber through the dielectric plate | Tetsu Osawa | 2002-04-16 |