Issued Patents All Time
Showing 1–25 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249492 | Electrostatic chuck device | Tetsuro ITAGAKI | 2025-03-11 |
| 12119212 | Wafer support device | Tetsuro ITAGAKI | 2024-10-15 |
| 12087552 | Plasma processing apparatus and plasma processing method | — | 2024-09-10 |
| 12051564 | Shower plate, plasma processing apparatus and plasma processing method | Taro Ikeda, Satoru Kawakami | 2024-07-30 |
| 11990316 | Plasma processing apparatus and plasma processing method | — | 2024-05-21 |
| 11929234 | Plasma processing apparatus and lower stage | Taro Ikeda, Sumi Tanaka, Satoru Kawakami | 2024-03-12 |
| 11923170 | Plasma processing apparatus and plasma processing method | Satoru Kawakami, Hiroyuki Yamamoto, Taro Ikeda | 2024-03-05 |
| 11854772 | Plasma processing apparatus and plasma processing method | — | 2023-12-26 |
| 11687643 | Information linkage system and information linkage method | Hiroaki Konoura, Masafumi Kinoshita, Hirofumi Inomata, Ryouichi Tanaka | 2023-06-27 |
| 11443927 | Plasma treatment device | — | 2022-09-13 |
| 11118262 | Substrate processing apparatus having a gas-mixing manifold | Naoto Tsuji | 2021-09-14 |
| 10674595 | Plasma processing apparatus and method for controlling plasma processing apparatus | — | 2020-06-02 |
| 10354844 | Insulator structure for avoiding abnormal electrical discharge and plasma concentration | Hiroshi Kondo | 2019-07-16 |
| 9196460 | Plasma processing apparatus and plasma processing method | Tadahiro Ohmi | 2015-11-24 |
| 9105450 | Plasma processing apparatus | Tadahiro Ohmi | 2015-08-11 |
| 9095039 | Plasma processing apparatus and plasma processing method | Tadahiro Ohmi | 2015-07-28 |
| 8733281 | Plasma processing apparatus | Tadahiro Ohmi, Takahiro Horiguchi | 2014-05-27 |
| 8573151 | Microwave plasma processing apparatus, dielectric window for use in the microwave plasma processing apparatus, and method for manufacturing the dielectric window | Tadahiro Ohmi, Tetsuya Goto, Yasuyuki Shirai, Masafumi Kitano, Kohei Watanuki +2 more | 2013-11-05 |
| 8568556 | Plasma processing apparatus and method for using plasma processing apparatus | Tadahiro Ohmi | 2013-10-29 |
| 8327796 | Plasma processing apparatus and plasma processing method | Tadahiro Ohmi | 2012-12-11 |
| 8241457 | Plasma processing system, plasma measurement system, plasma measurement method, and plasma control system | Mitsuo Kato, Masaki Sugiyama, Akihiko Hiroe, Tadahiro Ohmi | 2012-08-14 |
| 8114245 | Plasma etching device | Tadahiro Ohmi, Haruyuki Takano, Yusuke Hirayama | 2012-02-14 |
| 8092642 | Plasma processing apparatus | Toshiaki Hongo, Tadahiro Ohmi | 2012-01-10 |
| 8059875 | Information processor, method of detecting factor influencing health, and program | Sayuri Uehara, Yasuyuki Oki | 2011-11-15 |
| 7879182 | Shower plate, plasma processing apparatus, and product manufacturing method | Tadahiro Ohmi, Tetsuya Goto | 2011-02-01 |