Issued Patents All Time
Showing 51–75 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830652 | Microwave plasma processing apparatus | Tadahiro Ohmi | 2004-12-14 |
| 6829279 | Laser oscillating apparatus, exposure apparatus using the same and device fabrication method | Tadahiro Ohmi, Nobumasa Suzuki, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara | 2004-12-07 |
| 6818852 | Microwave plasma processing device, plasma processing method, and microwave radiating member | Tadahiro Ohmi, Tetsuya Goto | 2004-11-16 |
| 6804285 | Gas supply path structure for a gas laser | Tadahiro Ohmi, Hiroshi Osawa, Nobuyoshi Tanaka, Kazuhide Ino, Toshikuni Shinohara +1 more | 2004-10-12 |
| 6801554 | Laser oscillating apparatus, exposure apparatus, and device fabrication method | Tadahiro Ohmi, Nobumasa Suzuki, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara | 2004-10-05 |
| 6783628 | Plasma processing apparatus | Naoko Yamamoto, Tatsushi Yamamoto, Tadahiro Ohmi | 2004-08-31 |
| 6753496 | Plasma processing apparatus | Takamitsu Tadera, Tatsushi Yamamoto, Tadahiro Ohmi | 2004-06-22 |
| 6744802 | Laser oscillating apparatus with slotted waveguide | Tadahiro Ohmi, Nobumasa Suzuki, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara | 2004-06-01 |
| 6736606 | Vacuum apparatus | Tadahiro Ohmi | 2004-05-18 |
| 6726802 | Plasma processing apparatus | Takamitsu Tadera, Tatsushi Yamamoto, Tadahiro Ohmi | 2004-04-27 |
| 6719875 | Plasma process apparatus | Tadahiro Ohmi, Takahisa Nitta, Ryu Kaiwara, Kazuhide Ino | 2004-04-13 |
| 6690702 | Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube | Tadahiro Ohmi, Nobuyoshi Tanaka | 2004-02-10 |
| 6675737 | Plasma processing apparatus | Toshiaki Hongoh, Tetsu Osawa, Tadahiro Ohmi | 2004-01-13 |
| 6650678 | Laser oscillating apparatus | Tadahiro Ohmi, Nobumasa Suzuki, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara | 2003-11-18 |
| 6638392 | Plasma process apparatus | Naoko Yamamoto, Takamitsu Tadera, Tatsushi Yamamoto, Tadahiro Ohmi | 2003-10-28 |
| 6620290 | Plasma process apparatus | Tatsushi Yamamoto, Masaya Okamoto, Tadahiro Ohmi | 2003-09-16 |
| 6609564 | Reductive heat exchange water and heat exchange system using such water | Takashi Imaoka, Hiroshi Morita, Isamu Sugiyama, Tadahiro Ohmi | 2003-08-26 |
| 6603786 | Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube | Tadahiro Ohmi, Nobuyoshi Tanaka | 2003-08-05 |
| 6585851 | Plasma etching device | Tadahiro Ohmi, Haruyuki Takano, Yusuke Hirayama | 2003-07-01 |
| 6527908 | Plasma process apparatus | Norio Kanetsuki, Takamitsu Tadera, Tatsushi Yamamoto, Tadahiro Ohmi | 2003-03-04 |
| 6446573 | Plasma process device | Tadahiro Ohmi, Tatsushi Yamamoto, Takamitsu Tadera | 2002-09-10 |
| 6423178 | Apparatus for plasma process | Tadahiro Ohmi | 2002-07-23 |
| 6357385 | Plasma device | Tadahiro Ohmi, Takahisa Nitta, Haruyuki Takano, Ryu Kaiwara | 2002-03-19 |
| 6350376 | Reductive heat exchange water and heat exchange system using such water | Takashi Imaoka, Hiroshi Morita, Isamu Sugiyama, Tadahiro Ohmi | 2002-02-26 |
| 6331994 | Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube | Tadahiro Ohmi, Nobuyoshi Tanaka | 2001-12-18 |