Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048112 | Rod fixing apparatus for vertebra connecting member | Yutaka Nohara, Shinnosuke Nakahara, Shigenobu Sato, Kazumasa Ueyama, Kazuhiro Hasegawa +2 more | 2011-11-01 |
| 8012822 | Process for forming dielectric films | Naomu Kitano, Yusuke Fukuchi, Hideo Kitagawa | 2011-09-06 |
| 7982381 | Electron source and image display apparatus | — | 2011-07-19 |
| 7572278 | Rod connector | Yutaka Nohara, Shinnosuke Nakahara, Shigenobu Sato, Kazumasa Ueyama, Kazuhiro Hasegawa +2 more | 2009-08-11 |
| 7569070 | Rod connector | Yutaka Nohara, Shinnosuke Nakahara, Shigenobu Sato, Kazumasa Ueyama, Kazuhiro Hasegawa +2 more | 2009-08-04 |
| 6916678 | Surface modification method | Hideo Kitagawa, Shinzo Uchiyama | 2005-07-12 |
| 6884318 | Plasma processing system and surface processing method | — | 2005-04-26 |
| 6870123 | Microwave applicator, plasma processing apparatus having same, and plasma processing method | Shigenobu Yokoshima | 2005-03-22 |
| 6829279 | Laser oscillating apparatus, exposure apparatus using the same and device fabrication method | Tadahiro Ohmi, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara, Masaki Hirayama | 2004-12-07 |
| 6801554 | Laser oscillating apparatus, exposure apparatus, and device fabrication method | Tadahiro Ohmi, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara, Masaki Hirayama | 2004-10-05 |
| 6744802 | Laser oscillating apparatus with slotted waveguide | Tadahiro Ohmi, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara, Masaki Hirayama | 2004-06-01 |
| 6677549 | Plasma processing apparatus having permeable window covered with light shielding film | Shinzo Uchiyama, Hideo Kitagawa | 2004-01-13 |
| 6652709 | Plasma processing apparatus having circular waveguide, and plasma processing method | Shigenobu Yokoshima | 2003-11-25 |
| 6650678 | Laser oscillating apparatus | Tadahiro Ohmi, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara, Masaki Hirayama | 2003-11-18 |
| 6541982 | Plasma density measuring method and apparatus, and plasma processing system using the same | Hideo Kitagawa | 2003-04-01 |
| 6497783 | Plasma processing apparatus provided with microwave applicator having annular waveguide and processing method | Manabu Matsuo, Hirohisa Oda | 2002-12-24 |
| 6238527 | Thin film forming apparatus and method of forming thin film of compound by using the same | Kazuho Sone | 2001-05-29 |
| 6080679 | High-speed soft evacuation process and system | — | 2000-06-27 |
| 6007878 | Process for producing an optical recording medium having a protective layer formed using a plasma processing device | Kunio Takada, Toshimori Miyakoshi | 1999-12-28 |
| 5983829 | Microwave plasma etching apparatus | — | 1999-11-16 |
| 5985091 | Microwave plasma processing apparatus and microwave plasma processing method | — | 1999-11-16 |
| 5975012 | Deposition apparatus | Senichi Hayashi | 1999-11-02 |
| 5892136 | Process for producing iodotrifluoromethane | Noritaka Nagasaki, Satohiro Nakano, Nobuyuki Kunihiro | 1999-04-06 |
| 5803974 | Chemical vapor deposition apparatus | Nobuo Mikoshiba, Tadahiro Ohmi, Kazuo Tsubouchi, Kazuya Masu | 1998-09-08 |
| 5803975 | Microwave plasma processing apparatus and method therefor | — | 1998-09-08 |