Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5824150 | Process for forming deposited film by use of alkyl aluminum hydride | Kazuo Tsubouchi, Kazuya Masu | 1998-10-20 |
| 5803974 | Chemical vapor deposition apparatus | Tadahiro Ohmi, Kazuo Tsubouchi, Kazuya Masu, Nobumasa Suzuki | 1998-09-08 |
| 5779804 | Gas feeding device for controlled vaporization of an organanometallic compound used in deposition film formation | Kazuo Tsubouchi, Kazuya Masu | 1998-07-14 |
| 5755885 | Gas feeding device for controlled vaporization of an organometallic compound used in deposition film formation | Kazuo Tsubouchi, Kazuya Masu | 1998-05-26 |
| 5753320 | Process for forming deposited film | Tadahiro Ohmi, Kazuo Tsubouchi, Kazuya Masu, Nobumasa Suzuki | 1998-05-19 |
| 5705224 | Vapor depositing method | Junichi Murota, Shoichi Ono, Masao Sakuraba, Harushige Kurokawa, Fumihide Ikeda | 1998-01-06 |
| 5476547 | Gas feeding device for controlled vaporization of an organometallic compound used in deposition film formation | Kazuo Tsubouchi, Kazuya Masu | 1995-12-19 |
| 5393699 | Deposited film formation method utilizing selective deposition by use of alkyl aluminum hydride | Kazuo Tsubouchi, Kazuya Masu | 1995-02-28 |
| 5378983 | Scanning tunneling potentio-spectroscopic microscope and a data detecting method | Akira Yagi, Takao Okada, Seizo Morita | 1995-01-03 |
| 5328873 | Process for forming deposited film by use of alkyl aluminum hydride | Kazuo Tsubouchi, Kazuya Masu | 1994-07-12 |
| 5316972 | Process for forming deposited film by use of alkyl aluminum hydride and process for preparing semiconductor device | Kazuo Tsubouchi, Kazuya Masu | 1994-05-31 |
| 5272721 | Spread spectrum receiving device | Kazuo Tsubouchi | 1993-12-21 |
| 5262673 | Semiconductor element | Kazuo Tsubouchi | 1993-11-16 |
| 5245207 | Integrated circuit | Kazuo Tsubouchi, Kazuya Masu | 1993-09-14 |
| 5196372 | Process for forming metal deposited film containing aluminum as main component by use of alkyl hydride | Kazuo Tsubouchi, Kazuya Masu | 1993-03-23 |
| 5185572 | Scanning tunneling potentio-spectroscopic microscope and a data detecting method | Akira Yagi, Takao Okada, Seizo Morita | 1993-02-09 |
| 5180687 | Deposited film formation method utilizing selective deposition by use of alkyl aluminum hydride | Kazuo Tsubouchi, Kazuya Masu | 1993-01-19 |
| 5179042 | Process for forming deposited film by use of alkyl aluminum hydride | Kazuo Tsubouchi, Kazuya Masu | 1993-01-12 |
| 5099495 | Spread spectrum communication device | Kazuo Tsubouchi | 1992-03-24 |
| 5093573 | Reflection electron diffractometer and method for observing microscopic surface structure | Tadashiro Ohmi, Kazuo Tsubouchi, Kazuya Masu | 1992-03-03 |
| 5091210 | Plasma CVD of aluminum films | Kazuo Tsubouchi, Kazuya Masu | 1992-02-25 |
| 5025153 | Scanning tunneling spectroscope and a spectroscopic information detection method | Takao Okada, Akira Yagi, Seizo Morita | 1991-06-18 |
| 4989541 | Thin film forming apparatus | Kazuo Tsubouchi | 1991-02-05 |
| 4926440 | Spread-spectrum communication apparatus | Kazuo Tsubouchi, Takeshi Tomioka | 1990-05-15 |
| 4877957 | Scanning type tunnel microscope | Takao Okada, Toshihito Kouchi, Shuzo Mishima, Haruo Ogawa, Seizo Morita | 1989-10-31 |