Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8293014 | Substrate processing apparatus and reaction tube for processing substrate | — | 2012-10-23 |
| 5705224 | Vapor depositing method | Junichi Murota, Shoichi Ono, Masao Sakuraba, Nobuo Mikoshiba, Fumihide Ikeda | 1998-01-06 |
| 4503807 | Chemical vapor deposition apparatus | Satoshi Nakayama, Hideaki Takeuchi, Junichi Murota, Tatuhiko Hurukado, Shigeru Takeda +2 more | 1985-03-12 |