Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6864463 | Substrate processing apparatus and semiconductor device producing method | — | 2005-03-08 |
| 6462411 | Semiconductor wafer processing apparatus for transferring a wafer mount | Tomoji Watanabe, Nobuyuki Mise, Toshiyuki Uchino, Norio Suzuki, Yoshihiko Sakurai +3 more | 2002-10-08 |
| 6332927 | Substrate processing apparatus | Yasuhiro Inokuchi | 2001-12-25 |
| 6270581 | Wet-oxidation apparatus and wet-oxidation method | Yasuhiro Inokuchi | 2001-08-07 |
| 6217663 | Substrate processing apparatus and substrate processing method | Yasuhiro Inokuchi, Michiko Nishiwaki, Masatoshi Takada, Mamoru Sueyoshi | 2001-04-17 |
| 6139641 | Substrate processing apparatus having a gas heating tube | Yasuhiro Inokuchi | 2000-10-31 |
| 6132553 | Substrate processing apparatus | Yasuhiro Inokuchi | 2000-10-17 |
| 5960159 | Heat treatment of semiconductor wafers where upper heater directly heats upper wafer in its entirety and lower heater directly heats lower wafer in its entirety | Junichi Machida, Masayuki Tomita, Yasuhiro Inokuchi, Kazuhiro Shimeno, Hisashi Nomura +1 more | 1999-09-28 |
| 5705224 | Vapor depositing method | Junichi Murota, Shoichi Ono, Masao Sakuraba, Nobuo Mikoshiba, Harushige Kurokawa | 1998-01-06 |
| 5387265 | Semiconductor wafer reaction furnace with wafer transfer means | Satoshi Kakizaki, Toshikazu Karino, Shoichiro Izumi, Mikio Koizumi, Makoto Ozawa +2 more | 1995-02-07 |