Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5902103 | Vertical furnace of a semiconductor manufacturing apparatus and a boat cover thereof | Kiyohiko Maeda, Tomoshi Taniyama, Hidehiro Yanagawa, Ken Suzaki | 1999-05-11 |
| 5387265 | Semiconductor wafer reaction furnace with wafer transfer means | Toshikazu Karino, Shoichiro Izumi, Mikio Koizumi, Makoto Ozawa, Fumihide Ikeda +2 more | 1995-02-07 |