Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6143083 | Substrate transferring mechanism | Shuji Yonemitsu, Hisashi Yoshida, Shinichiro Watahiki, Yuji Yoshida, Hideo Shimura +3 more | 2000-11-07 |
| 6066210 | Substrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure section | Shuji Yonemitsu, Hisashi Yoshida, Shinichiro Watahiki, Yuji Yoshida, Hideo Shimura +3 more | 2000-05-23 |
| 5788447 | Substrate processing apparatus | Shuji Yonemitsu, Hisashi Yoshida, Shinichiro Watahiki, Yuji Yoshida, Hideo Shimura +3 more | 1998-08-04 |
| 5387265 | Semiconductor wafer reaction furnace with wafer transfer means | Satoshi Kakizaki, Shoichiro Izumi, Mikio Koizumi, Makoto Ozawa, Fumihide Ikeda +2 more | 1995-02-07 |
| 5217340 | Wafer transfer mechanism in vertical CVD diffusion apparatus | Yasuhiro Harada, Ryoji Saito, Koji Tometsuka, Shoichiro Izumi | 1993-06-08 |
| 5112641 | Wafer transfer method in vertical CVD diffusion apparatus | Yasuhiro Harada, Ryoji Saito, Koji Tometsuka, Shoichiro Izumi | 1992-05-12 |