Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5217340 | Wafer transfer mechanism in vertical CVD diffusion apparatus | Yasuhiro Harada, Toshikazu Karino, Ryoji Saito, Shoichiro Izumi | 1993-06-08 |
| 5112641 | Wafer transfer method in vertical CVD diffusion apparatus | Yasuhiro Harada, Toshikazu Karino, Ryoji Saito, Shoichiro Izumi | 1992-05-12 |