Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6143083 | Substrate transferring mechanism | Toshikazu Karino, Hisashi Yoshida, Shinichiro Watahiki, Yuji Yoshida, Hideo Shimura +3 more | 2000-11-07 |
| 6066210 | Substrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure section | Toshikazu Karino, Hisashi Yoshida, Shinichiro Watahiki, Yuji Yoshida, Hideo Shimura +3 more | 2000-05-23 |
| 5788447 | Substrate processing apparatus | Toshikazu Karino, Hisashi Yoshida, Shinichiro Watahiki, Yuji Yoshida, Hideo Shimura +3 more | 1998-08-04 |
| 5632820 | Thermal treatment furnace in a system for manufacturing semiconductors | Tomoshi Taniyama, Hideki Kaihotsu, Yoshikatsu Kanamori, Kazuhito Ikeda | 1997-05-27 |