Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6190104 | Treatment object conveyor apparatus, semiconductor manufacturing apparatus, and treatment object treatment method | Kazuhito Ikeda, Hisashi Yoshida, Yukinori Aburatani | 2001-02-20 |
| 6143083 | Substrate transferring mechanism | Shuji Yonemitsu, Toshikazu Karino, Hisashi Yoshida, Yuji Yoshida, Hideo Shimura +3 more | 2000-11-07 |
| 6066210 | Substrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure section | Shuji Yonemitsu, Toshikazu Karino, Hisashi Yoshida, Yuji Yoshida, Hideo Shimura +3 more | 2000-05-23 |
| 5788447 | Substrate processing apparatus | Shuji Yonemitsu, Toshikazu Karino, Hisashi Yoshida, Yuji Yoshida, Hideo Shimura +3 more | 1998-08-04 |