Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131902 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Naofumi Ohashi, Tetsuo Yamamoto | 2024-10-29 |
| 11891697 | Substrate processing apparatus | Naofumi Ohashi, Takashi Yahata, Shun MATSUI | 2024-02-06 |
| 11521848 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Naofumi Ohashi, Tetsuo Yamamoto | 2022-12-06 |
| 11424146 | Substrate processing apparatus and temperature measurement unit | Shin Hiyama | 2022-08-23 |
| 11289350 | Method of manufacturing semiconductor device | Takashi Yahata, Tadashi Takasaki, Naofumi Ohashi, Shun MATSUI, Keita ICHIMURA | 2022-03-29 |
| 10453720 | Method of manufacturing semiconductor device | Takashi Yahata, Tadashi Takasaki, Naofumi Ohashi, Shun MATSUI, Keita ICHIMURA | 2019-10-22 |
| 10403478 | Plasma processing apparatus and method of manufacturing semiconductor device | Hidehiro Yanai, Shin Hiyama, Toshiya Shimada | 2019-09-03 |
| 10014171 | Method of manufacturing semiconductor device | Shin Hiyama, Tsuyoshi Takeda, Naofumi Ohashi | 2018-07-03 |
| D795715 | Substrate thermometry unit | — | 2017-08-29 |
| D795716 | Substrate thermometry unit | — | 2017-08-29 |
| 9082797 | Substrate processing apparatus and method of manufacturing semiconductor device | Toshiya Shimada, Kenji Shinozaki, Tomihiro Amano, Hiroshi Ashihara, Hidehiro Yanai +2 more | 2015-07-14 |
| 8876453 | Substrate processing apparatus and method of manufacturing semiconductor device | Masakazu Shimada, Osamu Morita | 2014-11-04 |
| 8814488 | Substrate processing apparatus and semiconductor device manufacturing method | — | 2014-08-26 |
| 8420167 | Method of manufacturing a semiconductor device | Seiyo Nakashima | 2013-04-16 |
| 8277161 | Substrate processing apparatus and manufacturing method of a semiconductor device | Seiyo Nakashima | 2012-10-02 |
| 8128333 | Substrate processing apparatus and manufacturing method for semiconductor devices | — | 2012-03-06 |
| D652395 | Semiconductor manufacturing equipment | Masakazu Shimada, Takashi Nogami, Satoshi Aizawa, Seiyo Nakashima, Tomoyuki Yamada +2 more | 2012-01-17 |
| D651990 | Semiconductor manufacturing equipment | Masakazu Shimada, Takashi Nogami, Satoshi Aizawa, Seiyo Nakashima, Tomoyuki Yamada +2 more | 2012-01-10 |
| 7700054 | Substrate processing apparatus having gas side flow via gas inlet | Akira Hayashida, Masaaki Ueno, Masakazu Shimada, Tomoyuki Yamada, Seiyo Nakashima +1 more | 2010-04-20 |
| 6190104 | Treatment object conveyor apparatus, semiconductor manufacturing apparatus, and treatment object treatment method | Kazuhito Ikeda, Shinichiro Watahiki, Hisashi Yoshida | 2001-02-20 |
| 6143083 | Substrate transferring mechanism | Shuji Yonemitsu, Toshikazu Karino, Hisashi Yoshida, Shinichiro Watahiki, Yuji Yoshida +3 more | 2000-11-07 |
| 6066210 | Substrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure section | Shuji Yonemitsu, Toshikazu Karino, Hisashi Yoshida, Shinichiro Watahiki, Yuji Yoshida +3 more | 2000-05-23 |
| 5788447 | Substrate processing apparatus | Shuji Yonemitsu, Toshikazu Karino, Hisashi Yoshida, Shinichiro Watahiki, Yuji Yoshida +3 more | 1998-08-04 |