Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948778 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Toru Kakuda, Toshiya Shimada, Tomihiro Amano | 2024-04-02 |
| 11424146 | Substrate processing apparatus and temperature measurement unit | Yukinori Aburatani | 2022-08-23 |
| 11101111 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Toru Kakuda, Toshiya Shimada, Tomihiro Amano | 2021-08-24 |
| 10763084 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Toru Kakuda, Toshiya Shimada, Tomihiro Amano | 2020-09-01 |
| 10403478 | Plasma processing apparatus and method of manufacturing semiconductor device | Hidehiro Yanai, Toshiya Shimada, Yukinori Aburatani | 2019-09-03 |
| 10153153 | Method for removing adhering matter and dry etching method | Akiou Kikuchi, Masanori Watari, Kenji Kameda, Yasutoshi TSUBOTA | 2018-12-11 |
| 10121651 | Method of manufacturing semiconductor device | Arito OGAWA | 2018-11-06 |
| 10014171 | Method of manufacturing semiconductor device | Yukinori Aburatani, Tsuyoshi Takeda, Naofumi Ohashi | 2018-07-03 |
| 9911580 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Toru Kakuda, Toshiya Shimada, Tomihiro Amano | 2018-03-06 |
| 9082797 | Substrate processing apparatus and method of manufacturing semiconductor device | Yukinori Aburatani, Toshiya Shimada, Kenji Shinozaki, Tomihiro Amano, Hiroshi Ashihara +2 more | 2015-07-14 |