Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12091751 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Satoshi Takano | 2024-09-17 |
| 11948778 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toru Kakuda, Toshiya Shimada | 2024-04-02 |
| 11942333 | Method of manufacturing semiconductor device, cleaning method, and non-transitory computer-readable recording medium | — | 2024-03-26 |
| 11574815 | Method of manufacturing semiconductor device | — | 2023-02-07 |
| 11101111 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toru Kakuda, Toshiya Shimada | 2021-08-24 |
| 10763084 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toru Kakuda, Toshiya Shimada | 2020-09-01 |
| 9911580 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toru Kakuda, Toshiya Shimada | 2018-03-06 |
| 9082797 | Substrate processing apparatus and method of manufacturing semiconductor device | Yukinori Aburatani, Toshiya Shimada, Kenji Shinozaki, Hiroshi Ashihara, Hidehiro Yanai +2 more | 2015-07-14 |