Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087598 | Substrate processing apparatus | Hideto Tateno, Daisuke Hara, Masahisa Okuno, Takuya JODA, Takashi Tsukamoto +2 more | 2024-09-10 |
| 11948778 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toshiya Shimada, Tomihiro Amano | 2024-04-02 |
| 11168396 | Method of manufacturing semiconductor device and recording medium | Masahisa Okuno, Katsuhiko Yamamoto, Takuya JODA, Sadayoshi Horii | 2021-11-09 |
| 11101111 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toshiya Shimada, Tomihiro Amano | 2021-08-24 |
| 10985017 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Katsuhiko Yamamoto, Takuya JODA, Sadayoshi Horii | 2021-04-20 |
| 10763084 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toshiya Shimada, Tomihiro Amano | 2020-09-01 |
| 9911580 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toshiya Shimada, Tomihiro Amano | 2018-03-06 |
| 9793112 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Takuya JODA, Masahisa Okuno, Hideto Tateno | 2017-10-17 |