Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948778 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toru Kakuda, Tomihiro Amano | 2024-04-02 |
| 11101111 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toru Kakuda, Tomihiro Amano | 2021-08-24 |
| 10763084 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toru Kakuda, Tomihiro Amano | 2020-09-01 |
| 10403478 | Plasma processing apparatus and method of manufacturing semiconductor device | Hidehiro Yanai, Shin Hiyama, Yukinori Aburatani | 2019-09-03 |
| 9911580 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toru Kakuda, Tomihiro Amano | 2018-03-06 |
| 9082797 | Substrate processing apparatus and method of manufacturing semiconductor device | Yukinori Aburatani, Kenji Shinozaki, Tomihiro Amano, Hiroshi Ashihara, Hidehiro Yanai +2 more | 2015-07-14 |
| 7691413 | Composite particle and process for producing the same | Masafumi Miyamoto, Yasushi Sasaki, Shinobu Hiramatsu | 2010-04-06 |
| 6410605 | Process for preparing emulsion | Kouichi Funada, Hidetake Nakamura, Hideaki Kubo | 2002-06-25 |
| 5613848 | Process for the production of glass-like carbon substrates for use as recording media and a setter for use in the process | Ryoichi Hashimoto, Hiroshi Inatome, Manabu Shibata | 1997-03-25 |