Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153153 | Method for removing adhering matter and dry etching method | Akiou Kikuchi, Kenji Kameda, Shin Hiyama, Yasutoshi TSUBOTA | 2018-12-11 |
| 9676626 | IF7-derived iodine fluoride compound recovery method and recovery device | Akiou Kikuchi | 2017-06-13 |
| 9524877 | Silicon dry etching method | Akiou Kikuchi, Isamu Mori | 2016-12-20 |