Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872780 | Dry etching agent composition and dry etching method | Hiroyuki Oomori, Akifumi Yao | 2020-12-22 |
| 9524877 | Silicon dry etching method | Akiou Kikuchi, Masanori Watari | 2016-12-20 |
| 9238872 | Method for synthesizing fluorine compound by electrolysis and electrode therefor | Akifumi Yao, Akiou Kikuchi, Masaaki Yonekura, Hiroshi Horiuchi | 2016-01-19 |
| 9234133 | Etching gas | Naoto Takada | 2016-01-12 |
| 9230821 | Dry etching agent and dry etching method using the same | Yasuo Hibino, Tomonori Umezaki, Akiou Kikuchi, Satoru Okamoto | 2016-01-05 |
| 9165776 | Dry etching method | Tomonori Umezaki | 2015-10-20 |
| 9093388 | Dry etching agent and dry etching method using the same | Yasuo Hibino, Tomonori Umezaki, Akiou Kikuchi, Satoru Okamoto | 2015-07-28 |
| 9017571 | Dry etching agent and dry etching method | Tomonori Umezaki, Yasuo Hibino, Satoru Okamoto, Akiou Kikuchi | 2015-04-28 |
| 8562751 | Dry cleaning method of substrate processing apparatus | Isao Gunji, Yusaku Izawa, Hitoshi Itoh, Tomonori Umezaki, Yuta Takeda | 2013-10-22 |
| 8105566 | Method for producing oxygen-containing halogenated fluoride | Akiou Kikuchi | 2012-01-31 |
| 7417167 | Process for producing carbonyl difluoride | Mitsuya Ohashi | 2008-08-26 |
| 6673262 | Gas for removing deposit and removal method using same | Tetsuya Tamura, Mitsuya Ohashi | 2004-01-06 |
| 6347832 | Child seat | — | 2002-02-19 |
| 6299249 | Child seat | — | 2001-10-09 |