Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12304833 | Tungsten hexafluoride manufacturing method, tungsten hexafluoride purification method, and tungsten hexafluoride | Takanori Hamana, Takanori Ogata, Ryuichi Nakamura | 2025-05-20 |
| 9343774 | Method for producing a lithium hexafluorophosphate concentrated liquid | Meguru Oe, Keiji Sato, Toshinori Mitsui | 2016-05-17 |
| 7973390 | Modifier for low dielectric constant film, and method for production thereof | Tsuyoshi Ogawa | 2011-07-05 |
| 7744769 | Gas for removing deposit and removal method using same | Isamu Mouri, Tetsuya Tamura | 2010-06-29 |
| 7417167 | Process for producing carbonyl difluoride | Isamu Mori | 2008-08-26 |
| 7355060 | Method for producing organosilane | Tsuyoshi Ogawa, Yoshihiro Muramatsu | 2008-04-08 |
| 7168436 | Gas for removing deposit and removal method using same | Isamu Mouri, Tetsuya Tamura | 2007-01-30 |
| 6673262 | Gas for removing deposit and removal method using same | Isamu Mori, Tetsuya Tamura | 2004-01-06 |
| 6659111 | Cleaning gas and method for cleaning vacuum treatment apparatus by flowing the cleaning gas | Isamu Mouri, Tetsuya Tamura, Tadayuki Kawashima, Masahiko Matsudo, Tatsuo Hatano | 2003-12-09 |
| 6147006 | Cleaning gas | Isamu Mouri, Tetsuya Tamura, Tadayuki Kawashima | 2000-11-14 |
| 5234679 | Method of refining tungsten hexafluoride containing molybdenum hexafluoride as an impurity | Takashi Suenaga, Takashi Yoneda, Yoshiyuki Kobayashi | 1993-08-10 |