Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7744769 | Gas for removing deposit and removal method using same | Tetsuya Tamura, Mitsuya Ohashi | 2010-06-29 |
| 7168436 | Gas for removing deposit and removal method using same | Tetsuya Tamura, Mitsuya Ohashi | 2007-01-30 |
| 6659111 | Cleaning gas and method for cleaning vacuum treatment apparatus by flowing the cleaning gas | Tetsuya Tamura, Mitsuya Ohashi, Tadayuki Kawashima, Masahiko Matsudo, Tatsuo Hatano | 2003-12-09 |
| 6147006 | Cleaning gas | Tetsuya Tamura, Mitsuya Ohashi, Tadayuki Kawashima | 2000-11-14 |
| 5069724 | Method of cleaning carbon member contaminated with inorganic deposits | Yoshiyuki Kobayashi, Takashi Suehaga, Tukasa Fujii | 1991-12-03 |