Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7615251 | Processing device using shower head structure and processing method | Akinobu Kakimoto, Kentaro Oshimo | 2009-11-10 |
| 6821874 | Method for depositing tungsten silicide film and method for preparing gate electrode/wiring | Kenji Suzuki, Kazuya Okubo | 2004-11-23 |
| 6659111 | Cleaning gas and method for cleaning vacuum treatment apparatus by flowing the cleaning gas | Isamu Mouri, Tetsuya Tamura, Mitsuya Ohashi, Tadayuki Kawashima, Tatsuo Hatano | 2003-12-09 |
| 6448178 | Heat treating method for thin film and forming method for thin film | Kenji Suzuki | 2002-09-10 |
| 6057694 | Testing method including the removal of insulative films for electrical contact and apparatus therefor | — | 2000-05-02 |
| 5698035 | Heat-resistant electrode material, electrode using the same, and apparatus having plasma generating unit using this electrode | Akira Koshiishi, Kei Isozaki, Yutaka Hirashima | 1997-12-16 |
| 5690998 | Method of coating a conductive probe needle | Yasushi Nagasawa, Satoru Yamashita | 1997-11-25 |
| 5532613 | Probe needle | Yasushi Nagasawa, Satoru Yamashita | 1996-07-02 |
| 5252892 | Plasma processing apparatus | Akira Koshiishi, Kohei Kawamura, Naoki Takayama | 1993-10-12 |
| 5101110 | Ion generator | Akira Koshiishi, Naoki Takayama, Kohei Kawamura | 1992-03-31 |
| 5089710 | Ion implantation equipment | Shuji Kikuchi, Mitsuyuki Yamaguchi | 1992-02-18 |
| 5049784 | Electron generating apparatus | — | 1991-09-17 |
| 5028791 | Electron beam excitation ion source | Akira Koshiishi, Kohei Kawamura, Naoki Takayama | 1991-07-02 |