Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12205799 | Plasma processing apparatus | Hiroyuki Miyashita | 2025-01-21 |
| 11842886 | Plasma processing method and plasma processing apparatus | Taro Ikeda, Hirokazu Ueda, Eiki KAMATA, Mitsutoshi ASHIDA | 2023-12-12 |
| 8562751 | Dry cleaning method of substrate processing apparatus | Yusaku Izawa, Hitoshi Itoh, Tomonori Umezaki, Yuta Takeda, Isamu Mori | 2013-10-22 |
| 8551565 | Film forming method and film forming apparatus | Hidenori Miyoshi, Hitoshi Itoh | 2013-10-08 |
| 8419856 | Substrate processing apparatus | — | 2013-04-16 |
| 8124168 | Substrate processing method and substrate processing apparatus | Kunihiro Tada, Hiroyuki Miyashita | 2012-02-28 |
| 8029856 | Film formation method and apparatus | Hidenori Miyoshi, Hitoshi Itoh | 2011-10-04 |
| 7582544 | ALD film forming method | Yumiko Kawano | 2009-09-01 |