Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266562 | Substrate processing method and substrate processing apparatus | Hajime Naito, Shigeki Doba | 2025-04-01 |
| 12162770 | Black powder, and method for producing same | Kenta GOTOU | 2024-12-10 |
| 11679985 | Black powder, and method for producing same | Kenta GOTOU | 2023-06-20 |
| 11024514 | Etching method and etching apparatus | Takuya Abe, Akitaka Shimizu, Koichi Nagakura | 2021-06-01 |
| 10825688 | Method for etching copper layer | Shigeru Tahara, Daisuke Urayama, Kenji Matsumoto | 2020-11-03 |
| 9293417 | Method for forming barrier film on wiring line | Masamichi Hara | 2016-03-22 |
| 8999102 | Substrate processing apparatus | Shuji AZUMO | 2015-04-07 |
| 8865590 | Film forming method, pretreatment device, and processing system | Kenji Matsumoto, Hitoshi Itoh, Shigetoshi Hosaka, Hiroshi Sato, Koji Neishi +1 more | 2014-10-21 |
| 8785311 | Film forming method, semiconductor device, manufacturing method thereof and substrate processing apparatus therefor | Shuji AZUMO | 2014-07-22 |
| 8765221 | Film forming method and film forming apparatus | Hitoshi Itoh, Hiroshi Sato | 2014-07-01 |
| 8709541 | Method for forming a film | Kenji Matsumoto | 2014-04-29 |
| 8653665 | Barrier layer, film forming method, and processing system | — | 2014-02-18 |
| 8610353 | Plasma generating apparatus, plasma processing apparatus and plasma processing method | Hitoshi Itoh, Masaru Hori, Hirotaka Toyoda, Makoto Sekine | 2013-12-17 |
| 8551565 | Film forming method and film forming apparatus | Isao Gunji, Hitoshi Itoh | 2013-10-08 |
| 8394231 | Plasma process device and plasma process method | Koichi Takatsuki, Hikaru Yoshitaka, Shigeo Ashigaki, Yoichi Inoue, Takashi Akahori +7 more | 2013-03-12 |
| 8354337 | Metal oxide film formation method and apparatus | Kenji Matsumoto, Hitoshi Itoh, Hiroshi Sato | 2013-01-15 |
| 8310054 | Semiconductor device manufacturing method and target substrate processing system | Kazuichi Hayashi | 2012-11-13 |
| 8138095 | Method of substrate treatment, process for producing semiconductor device, substrate treating apparatus, and recording medium | — | 2012-03-20 |
| 8114786 | Heat treatment method, heat treatment apparatus and substrate processing apparatus | — | 2012-02-14 |
| 8029856 | Film formation method and apparatus | Isao Gunji, Hitoshi Itoh | 2011-10-04 |
| 8003535 | Semiconductor device manufacturing method and target substrate processing system | Kazuichi Hayashi | 2011-08-23 |
| 7772130 | Insulation film forming method, insulation film forming system, and semiconductor device manufacturing method | Kazuo Komura | 2010-08-10 |
| 7709394 | Substrate processing method and apparatus fabrication process of a semiconductor device | Kenji Ishikawa, Yukio Takigawa, Yoshihiro Nakata, Hideki Tateishi | 2010-05-04 |
| 7556711 | Semiconductor device manufacturing apparatus and operating method thereof | — | 2009-07-07 |
| 7279434 | Material and method for forming low-dielectric-constant film | Nobuhiro Hata | 2007-10-09 |