Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266562 | Substrate processing method and substrate processing apparatus | Hajime Naito, Hidenori Miyoshi | 2025-04-01 |
| 11328904 | Substrate processing apparatus | Hiroyuki Ogawa, Hajime Naito, Akitaka Shimizu, Tatsuo Matsudo | 2022-05-10 |
| 10734201 | Substrate processing apparatus | Hiroyuki Ogawa, Hajime Naito, Akitaka Shimizu, Tatsuo Matsudo | 2020-08-04 |
| 10090161 | Plasma etching apparatus and plasma etching method | Satoshi Yamada | 2018-10-02 |
| D494551 | Exhaust ring for manufacturing semiconductors | — | 2004-08-17 |
| D491963 | Inner wall shield for a process chamber for manufacturing semiconductors | — | 2004-06-22 |