Issued Patents All Time
Showing 1–25 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387908 | Plasma treatment apparatus | — | 2025-08-12 |
| 12191124 | Plasma processing apparatus and plasma processing method | Yasushi Morita | 2025-01-07 |
| 12027344 | Film forming apparatus | Shinya Iwashita, Ayuta Suzuki, Takahiro SHINDO, Kazuki DEMPOH, Yasushi Morita +2 more | 2024-07-02 |
| 12020900 | Plasma processing device, and plasma processing method | Munehito KAGAYA, Satoru Kawakami, Tsuyoshi Moriya, Jun Yamawaku, Hiroyuki Onoda | 2024-06-25 |
| 11972921 | Temperature measurement system, temperature measurement method, and substrate processing apparatus | Takeshi Kobayashi | 2024-04-30 |
| 11443920 | Plasma processing apparatus | Jun Yamawaku, Chishio Koshimizu | 2022-09-13 |
| 11410834 | Substrate processing method | Keiichi Tanaka | 2022-08-09 |
| 11328904 | Substrate processing apparatus | Shigeki Doba, Hiroyuki Ogawa, Hajime Naito, Akitaka Shimizu | 2022-05-10 |
| 11315765 | Plasma processing apparatus and plasma processing method | Jun Yamawaku, Chishio Koshimizu | 2022-04-26 |
| 10937631 | Plasma processing apparatus and plasma processing method | Jun Yamawaku, Chishio Koshimizu | 2021-03-02 |
| 10746531 | Wear amount measuring apparatus and method, temperature measuring apparatus and method and substrate processing system | — | 2020-08-18 |
| 10734201 | Substrate processing apparatus | Shigeki Doba, Hiroyuki Ogawa, Hajime Naito, Akitaka Shimizu | 2020-08-04 |
| 10685859 | Plasma processing apparatus | Chishio Koshimizu | 2020-06-16 |
| 10325758 | Plasma processing apparatus | Jun Yamawaku, Chishio Koshimizu | 2019-06-18 |
| 10283328 | Plasma processing apparatus and plasma processing method | Jun Yamawaku, Chishio Koshimizu | 2019-05-07 |
| 10184786 | Wear amount measuring apparatus and method, temperature measuring apparatus and method and substrate processing system | — | 2019-01-22 |
| 9952032 | Temperature measuring method, substrate processing system and component to be provided in substrate processing apparatus of the substrate processing system | Chishio Koshimizu | 2018-04-24 |
| 9500537 | Temperature measurement apparatus and method | Jun Abe, Chishio Koshimizu | 2016-11-22 |
| 9459159 | Heat-flux measuring method, substrate processing system, and heat-flux measuring member | Chishio Koshimizu | 2016-10-04 |
| 9412562 | Capacitive coupling plasma processing apparatus | Shinji Himori | 2016-08-09 |
| 9304050 | Temperature measurement apparatus and method | Jun Abe, Chishio Koshimizu | 2016-04-05 |
| 9163931 | Apparatus and method for measuring thickness and temperature and substrate processing system | Chishio Koshimizu | 2015-10-20 |
| 9070725 | Measuring apparatus and plasma processing apparatus | Hidetoshi Kimura | 2015-06-30 |
| 9046417 | Temperature measuring system, substrate processing apparatus and temperature measuring method | Kenji Nagai | 2015-06-02 |
| 9038566 | Capacitive coupling plasma processing apparatus | Shinji Himori | 2015-05-26 |