Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7339656 | Method and apparatus for measuring electron density of plasma and plasma processing apparatus | Naoki Matsumoto, Yohei Yamazawa, Chishio Koshimizu, Sumie Segawa | 2008-03-04 |
| 7163877 | Method and system for modifying a gate dielectric stack containing a high-k layer using plasma processing | Hiroaki Niimi, Luigi Colombo, Koji Shimomura, Takuya Sugawara | 2007-01-16 |
| 6747748 | Manufacturing method for a field-effect transistor, manufacturing method for a semiconductor device, and apparatus therefor | Tomohiro Ohta, Tetsuji Yasuda, Masakazu Ichikawa, Takashi Nakayama | 2004-06-08 |