Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7582182 | Method and apparatus for measuring electron density of plasma and plasma processing apparatus | Naoki Matsumoto, Yohei Yamazawa, Chishio Koshimizu, Tatsuo Matsudo | 2009-09-01 |
| 7532322 | Method and apparatus for measuring electron density of plasma and plasma processing apparatus | Chishio Koshimizu, Tatsuo Matsudo | 2009-05-12 |
| 7339656 | Method and apparatus for measuring electron density of plasma and plasma processing apparatus | Naoki Matsumoto, Yohei Yamazawa, Chishio Koshimizu, Tatsuo Matsudo | 2008-03-04 |
| 6207007 | Plasma processing system | Toshiaki Makabe | 2001-03-27 |