Issued Patents All Time
Showing 1–25 of 162 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387907 | Plasma processing apparatus and substrate processing method | — | 2025-08-12 |
| 12362144 | Plasma processing apparatus and method for controlling source frequency of source radio-frequency power | — | 2025-07-15 |
| 12334305 | Plasma processing apparatus | — | 2025-06-17 |
| 12300465 | Plasma processing apparatus | — | 2025-05-13 |
| 12266511 | Substrate support and substrate processing apparatus | — | 2025-04-01 |
| 12261027 | Plasma processing apparatus and plasma processing method | Natsumi TORII, Koichi Nagami, Jun Abe | 2025-03-25 |
| 12249486 | Plasma processing apparatus and plasma processing method | — | 2025-03-11 |
| 12249487 | Plasma processing apparatus and plasma processing method | — | 2025-03-11 |
| 12176187 | Cleaning method and plasma processing apparatus | — | 2024-12-24 |
| 12165842 | Control method and plasma processing apparatus | Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2024-12-10 |
| 12125679 | Plasma processing apparatus and processing method | Gen TAMAMUSHI, Masahiro Inoue, Yuto KOSAKA, Shoichiro Matsuyama | 2024-10-22 |
| 12125672 | Plasma processing method and plasma processing apparatus | — | 2024-10-22 |
| 12057294 | Plasma processing apparatus and plasma processing method | Gen TAMAMUSHI, Masahiro Inoue | 2024-08-06 |
| 12046452 | Plasma processing apparatus | — | 2024-07-23 |
| 12020899 | Plasma processing apparatus and plasma processing method | — | 2024-06-25 |
| 11955314 | Plasma processing apparatus | — | 2024-04-09 |
| 11935727 | Substrate processing method | Jun Yamawaku | 2024-03-19 |
| 11908665 | Plasma processing apparatus and measurement method | Manabu Iwata | 2024-02-20 |
| 11875977 | Plasma processing apparatus and plasma processing method | — | 2024-01-16 |
| 11871503 | Plasma processing method and plasma processing apparatus | Takashi Dokan, Shinji Kubota | 2024-01-09 |
| 11830704 | Plasma processing apparatus and control method | Shin Hirotsu | 2023-11-28 |
| 11804368 | Cleaning method and plasma processing apparatus | — | 2023-10-31 |
| 11772138 | Processing apparatus and processing method, and gas cluster generating apparatus and gas cluster generating method | Kazuya Dobashi | 2023-10-03 |
| 11764034 | Plasma processing method and plasma processing apparatus | Shin Hirotsu, Takenobu Ikeda, Koichi Nagami, Shinji Himori | 2023-09-19 |
| 11764082 | Control method and plasma processing apparatus | Shinji Kubota, Koji Maruyama, Takashi Dokan, Koichi Nagami | 2023-09-19 |