Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198962 | Maintenance device, vacuum processing system, and maintenance method | — | 2025-01-14 |
| 12165842 | Control method and plasma processing apparatus | Chishio Koshimizu, Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Koji Maruyama | 2024-12-10 |
| 11871503 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Chishio Koshimizu | 2024-01-09 |
| 11764082 | Control method and plasma processing apparatus | Chishio Koshimizu, Shinji Kubota, Koji Maruyama, Koichi Nagami | 2023-09-19 |
| 11742182 | Control method and plasma processing apparatus | Chishio Koshimizu, Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Koji Maruyama | 2023-08-29 |
| 11742181 | Control method and plasma processing apparatus | Chishio Koshimizu, Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Koji Maruyama | 2023-08-29 |
| 11476089 | Control method and plasma processing apparatus | Chishio Koshimizu, Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Koji Maruyama | 2022-10-18 |
| 11337297 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Chishio Koshimizu | 2022-05-17 |
| 11282701 | Plasma processing method and plasma processing apparatus | Shinji Kubota | 2022-03-22 |
| 11170979 | Plasma etching method and plasma etching apparatus | Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Koji Maruyama, Kazuya Nagaseki +1 more | 2021-11-09 |
| 11087960 | Radio frequency power source and plasma processing apparatus | Shinji Kubota | 2021-08-10 |
| 11017985 | Plasma processing apparatus, impedance matching method, and plasma processing method | Chishio Koshimizu, Shinji Kubota | 2021-05-25 |
| 10622197 | Plasma processing apparatus and plasma processing method | Shinji Kubota, Koji Koyama, Naoki Matsumoto | 2020-04-14 |
| 10553407 | Plasma processing method and plasma processing apparatus | Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Koji Maruyama, Kazuya Nagaseki +1 more | 2020-02-04 |
| 9870901 | Method of producing processing condition of plasma processing apparatus, and plasma processing apparatus | — | 2018-01-16 |
| 9218983 | Etching method and device | Masaru Sasaki, Hikaru Kamata | 2015-12-22 |
| 6765256 | Semiconductor device | Masahiko Takeuchi | 2004-07-20 |