Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400832 | Plasma processing apparatus and plasma processing method | — | 2025-08-26 |
| 12261027 | Plasma processing apparatus and plasma processing method | Natsumi TORII, Chishio Koshimizu, Jun Abe | 2025-03-25 |
| 12255049 | Plasma processing apparatus and plasma processing method | Kazuya Nagaseki, Shinji Himori | 2025-03-18 |
| 12243723 | Plasma processing apparatus | Yusuke Hayasaka, Atsushi Sasaki, Kazuya Matsumoto, Shingo Takahashi | 2025-03-04 |
| 12154793 | Etching apparatus and etching method | Kazuya Nagaseki | 2024-11-26 |
| 12136535 | Plasma processing apparatus and plasma processing method | Tatsuro Ohshita | 2024-11-05 |
| 12033833 | Filter circuit and plasma processing apparatus | Koji Yamagishi, Yuji Aota, Kota ISHIHARADA | 2024-07-09 |
| 12033832 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Kazuya Nagaseki, Shinji Himori | 2024-07-09 |
| 11887817 | Plasma processing apparatus and plasma processing method | — | 2024-01-30 |
| 11776795 | Plasma processing apparatus and power supply control method | Tatsuro Ohshita | 2023-10-03 |
| 11764034 | Plasma processing method and plasma processing apparatus | Chishio Koshimizu, Shin Hirotsu, Takenobu Ikeda, Shinji Himori | 2023-09-19 |
| 11764082 | Control method and plasma processing apparatus | Chishio Koshimizu, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2023-09-19 |
| 11646181 | Plasma processing apparatus and plasma processing method | Natsumi TORII | 2023-05-09 |
| 11594398 | Apparatus and method for plasma processing | Yusuke Aoki, Fumiya TAKATA, Toshikatsu TOBANA, Shinya Morikita, Kazunobu Fujiwara +1 more | 2023-02-28 |
| 11387077 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Kazuya Nagaseki, Shinji Himori | 2022-07-12 |
| 11251048 | Plasma processing method and plasma processing apparatus | Yusuke Aoki, Toshikatsu TOBANA, Fumiya TAKATA, Shinya Morikita, Kazunobu Fujiwara +1 more | 2022-02-15 |
| 11170979 | Plasma etching method and plasma etching apparatus | Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama, Kazuya Nagaseki +1 more | 2021-11-09 |
| 10763126 | Etching apparatus and etching method | Kazuya Nagaseki | 2020-09-01 |
| 10707053 | Plasma processing method and plasma processing apparatus | Masafumi Urakawa | 2020-07-07 |
| 10615005 | Plasma generating method | Kazunobu Fujiwara, Tadashi Gondai, Norikazu Yamada, Naoyuki Umehara | 2020-04-07 |
| 10593519 | Plasma processing apparatus | Norikazu Yamada, Toshifumi Tachikawa | 2020-03-17 |
| 10553407 | Plasma processing method and plasma processing apparatus | Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama, Kazuya Nagaseki +1 more | 2020-02-04 |
| 10431433 | Plasma processing apparatus and plasma processing method | Natsumi TORII | 2019-10-01 |
| 10269539 | Plasma processing method | Kumiko Ono, Hiroshi Tsujimoto | 2019-04-23 |
| 10250217 | Method for impedance matching of plasma processing apparatus | Norikazu Yamada | 2019-04-02 |