Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10615005 | Plasma generating method | Koichi Nagami, Kazunobu Fujiwara, Tadashi Gondai, Norikazu Yamada | 2020-04-07 |
| 10264662 | Plasma processing apparatus | Manabu Iwata, Hiroki Endo | 2019-04-16 |
| 9736921 | Method for impedance matching of plasma processing apparatus | Koichi Nagami, Norikazu Yamada | 2017-08-15 |
| 9640368 | Plasma processing apparatus | Ryuji Ohtani, Shunichi Ito, Kazutaka Sei, Tomomasa Nishida | 2017-05-02 |
| 8038833 | Plasma processing apparatus | Satoshi Maebashi, Toshihiro Hayami | 2011-10-18 |
| 7008275 | Electrical joint forming member and plasma processing apparatus | Toshihiro Hayami, Tsuyoshi Hasegawa | 2006-03-07 |