Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10615005 | Plasma generating method | Koichi Nagami, Kazunobu Fujiwara, Norikazu Yamada, Naoyuki Umehara | 2020-04-07 |
| 9875881 | Plasma processing apparatus and plasma processing method | Kohichi Nagami, Norikazu Yamada, Kouichi Yoshida | 2018-01-23 |
| 9728381 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2017-08-08 |
| 9437402 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2016-09-06 |
| 8904957 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2014-12-09 |
| 8387562 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2013-03-05 |
| 8056503 | Plasma procesor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi +3 more | 2011-11-15 |
| 7569154 | Plasma processing method, plasma processing apparatus and computer storage medium | — | 2009-08-04 |