Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11908665 | Plasma processing apparatus and measurement method | Chishio Koshimizu | 2024-02-20 |
| 10854431 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2020-12-01 |
| 10546727 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2020-01-28 |
| 10529539 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +10 more | 2020-01-07 |
| 10264662 | Plasma processing apparatus | Naoyuki Umehara, Hiroki Endo | 2019-04-16 |
| 10141164 | Plasma processing apparatus and plasma processing method | Yasuharu Sasaki, Akihito Fushimi | 2018-11-27 |
| 9490105 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2016-11-08 |
| 9484180 | Plasma processing method and plasma processing apparatus | Yasuharu Sasaki | 2016-11-01 |
| 9099503 | Plasma processing apparatus | — | 2015-08-04 |
| 8999068 | Chamber cleaning method | Masanobu Honda, Hidetoshi Hanaoka, Taichi Hirano, Takanori Mimura, Taketoshi Okajo | 2015-04-07 |
| 8790490 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +6 more | 2014-07-29 |
| 8603293 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2013-12-10 |
| 8513563 | Plasma processing apparatus and plasma processing method | Naoki Matsumoto, Chishio Koshimizu, Yoshinobu Hayakawa, Hidetoshi Hanaoka, Satoshi Tanaka | 2013-08-20 |
| 8440050 | Plasma processing apparatus and method, and storage medium | Hiroyuki Nakayama, Kenji Masuzawa, Masanobu Honda | 2013-05-14 |
| 8431035 | Plasma processing apparatus and method | Chishio Koshimizu, Yohei Yamazawa | 2013-04-30 |
| 8425791 | In-chamber member temperature control method, in-chamber member, substrate mounting table and plasma processing apparatus including same | Chishio Koshimizu, Tatsuo Matsudo | 2013-04-23 |
| 8377255 | Plasma processing apparatus and method of controlling distribution of a plasma therein | — | 2013-02-19 |
| 8343306 | Plasma processing apparatus and method of plasma distribution correction | Satoshi Tanaka, Chishio Koshimizu, Naoki Matsumoto, Toru Ito | 2013-01-01 |
| 8317969 | Plasma processing apparatus | — | 2012-11-27 |
| 8303834 | Plasma processing apparatus and plasma etching method | Masanobu Honda, Kenji Masuzawa, Hiroyuki Nakayama, Manabu Sato, Kazuki Narishige | 2012-11-06 |
| 8251011 | Plasma processing apparatus | Yohei Yamazawa, Chishio Koshimizu, Fumihiko Higuchi, Akitaka Shimizu, Asao Yamashita +5 more | 2012-08-28 |
| 8138445 | Plasma processing apparatus and plasma processing method | Naoki Matsumoto, Chishio Koshimizu, Yoshinobu Hayakawa, Hidetoshi Hanaoka, Satoshi Tanaka | 2012-03-20 |
| 8137471 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +6 more | 2012-03-20 |
| 8034213 | Plasma processing apparatus and plasma processing method | Naoki Matsumoto, Yoshinobu Hayakawa, Hidetoshi Hanaoka, Noriaki Kodama, Chishio Koshimizu +1 more | 2011-10-11 |
| 7988816 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2011-08-02 |