Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7951262 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +10 more | 2011-05-31 |
| 7829463 | Plasma processing method and plasma processing apparatus | Naoki Matsumoto, Chishio Koshimizu, Satoshi Tanaka | 2010-11-09 |
| 7740737 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +6 more | 2010-06-22 |
| 7527016 | Plasma processing apparatus | Yohei Yamazawa, Chishio Koshimizu, Fumihiko Higuchi, Akitaka Shimizu, Asao Yamashita +5 more | 2009-05-05 |