Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9022225 | Filtration filter and production method therefor | Tsuyoshi Moriya | 2015-05-05 |
| 8501628 | Differential metal gate etching process | Vinh Luong, Hiroyuki Takahashi, Akiteru Ko, Vaidya Bharadwaj, Takashi Enomoto +1 more | 2013-08-06 |
| 8251011 | Plasma processing apparatus | Yohei Yamazawa, Manabu Iwata, Chishio Koshimizu, Fumihiko Higuchi, Akitaka Shimizu +5 more | 2012-08-28 |
| 8183062 | Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequences | Merritt Funk, Radha Sundararajan, Daniel Prager | 2012-05-22 |
| 8175736 | Method and system for performing a chemical oxide removal process | Masayuki Tomoyasu, Merritt Funk, Kevin Pinto, Masaya Odagiri, Lemuel Chen +2 more | 2012-05-08 |
| 8019458 | Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures | Merritt Funk, Radha Sundararajan, Daniel Prager, Hyung Joo Lee | 2011-09-13 |
| 7967995 | Multi-layer/multi-input/multi-output (MLMIMO) models and method for using | Merritt Funk, Radha Sundararajan, Hyung Joo Lee, Daniel Prager | 2011-06-28 |
| 7939450 | Method and apparatus for spacer-optimization (S-O) | Merritt Funk, Daniel Prager, Lee Chen, Radha Sundararajan | 2011-05-10 |
| 7906032 | Method for conditioning a process chamber | — | 2011-03-15 |
| 7899637 | Method and apparatus for creating a gate optimization evaluation library | Merritt Funk, Daniel Prager, Lee Chen, Radha Sundararajan | 2011-03-01 |
| 7894927 | Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models for metal-gate structures | Merritt Funk, Radha Sundararajan, Daniel Prager, Hyung Joo Lee | 2011-02-22 |
| 7877161 | Method and system for performing a chemical oxide removal process | Masayuki Tomoyasu, Merritt Funk, Kevin Pinto, Masaya Odagiri, Lemuel Chen +2 more | 2011-01-25 |
| 7765077 | Method and apparatus for creating a Spacer-Optimization (S-O) library | Merritt Funk, Daniel Prager, Lee Chen, Radha Sundaranajan | 2010-07-27 |
| 7763404 | Methods and apparatus for changing the optical properties of resists | James E. Willis, Manuel Perez | 2010-07-27 |
| 7713758 | Method and apparatus for optimizing a gate channel | Merritt Funk, Daniel Prager, Lee Chen, Radha Sundararajan | 2010-05-11 |
| 7527016 | Plasma processing apparatus | Yohei Yamazawa, Manabu Iwata, Chishio Koshimizu, Fumihiko Higuchi, Akitaka Shimizu +5 more | 2009-05-05 |
| 7328418 | Iso/nested control for soft mask processing | Merritt Funk, Daniel Prager | 2008-02-05 |
| 7292906 | Formula-based run-to-run control | Merritt Funk, Kevin Pinto, Wesley C. Natzle | 2007-11-06 |
| 7209798 | Iso/nested cascading trim control with model feedback updates | Merritt Funk, Daniel Prager | 2007-04-24 |
| 7192532 | Dry etching method | Akiteru Koh, Toshihiro Miura, Takayuki Fukasawa, Akitaka Shimizu, Masato Kushibiki +1 more | 2007-03-20 |
| 7097779 | Processing system and method for chemically treating a TERA layer | Aelan Mosden | 2006-08-29 |
| 6893975 | System and method for etching a mask | Hongyu Yue | 2005-05-17 |