Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7473377 | Plasma processing method | Tomoyo Yamaguchi, Takashi Fuse, Kiwamu Fujimoto, Masanobu Honda, Kazuya Nagaseki +3 more | 2009-01-06 |
| 7192532 | Dry etching method | Toshihiro Miura, Takayuki Fukasawa, Akitaka Shimizu, Masato Kushibiki, Asao Yamashita +1 more | 2007-03-20 |
| 7183217 | Dry-etching method | Etsuo Iijima | 2007-02-27 |
| 7179752 | Dry etching method | Akitaka Shimizu, Takashi Tsuruta, Takashi Enomoto, Hiromi Oka | 2007-02-20 |