Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8288286 | Dry-etching method | Norikazu Yamada | 2012-10-16 |
| 7531460 | Dry-etching method | Meiki Koh | 2009-05-12 |
| 7504040 | Plasma processing apparatus and plasma processing method | Hiroshi Tsuchiya | 2009-03-17 |
| 7476624 | Dry-etching method | Norikazu Yamada | 2009-01-13 |
| 7183217 | Dry-etching method | Akiteru Koh | 2007-02-27 |