Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7507673 | Method for etching an object to be processed | Takashi Fuse, Kiwamu Fujimoto | 2009-03-24 |
| 7473377 | Plasma processing method | Takashi Fuse, Kiwamu Fujimoto, Masanobu Honda, Kazuya Nagaseki, Akiteru Koh +3 more | 2009-01-06 |
| 7432207 | Method for etching object to be processed | Takashi Fuse, Kiwamu Fujimoto | 2008-10-07 |
| 7115519 | Method for plasma treatment | — | 2006-10-03 |