Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7507673 | Method for etching an object to be processed | Takashi Fuse, Tomoyo Yamaguchi | 2009-03-24 |
| 7473377 | Plasma processing method | Tomoyo Yamaguchi, Takashi Fuse, Masanobu Honda, Kazuya Nagaseki, Akiteru Koh +3 more | 2009-01-06 |
| 7432207 | Method for etching object to be processed | Takashi Fuse, Tomoyo Yamaguchi | 2008-10-07 |
| 6967171 | Insulation film etching method | Nobuhiro Wada | 2005-11-22 |