Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11879067 | Film forming method and film forming apparatus | Takashi NAMIKAWA | 2024-01-23 |
| 11453787 | Antifouling composition, treatment device, treatment method, and treated article | Yasuo Itami, Madoka Okkotsu, Hidetoshi Kinoshita, Tatsuya FUKASAWA | 2022-09-27 |
| 11149149 | Antifouling treatment composition, treating apparatus, treating method and treated article | Yasuo Itami, Madoka Okkotsu, Hidetoshi Kinoshita, Tatsuya FUKASAWA | 2021-10-19 |
| 10664964 | Abnormal detection apparatus and method | Tetsuo Koezuka | 2020-05-26 |
| 10600621 | Plasma electrode and plasma processing device | Masato Morishima, Katsuhiko Iwabuchi, Madoka Fujimoto, Daisuke Nishide | 2020-03-24 |
| 10467745 | Abnormality detection device, abnormality detection method and non-transitory computer-readable recording medium | Tetsuo Koezuka | 2019-11-05 |
| 9099298 | Substrate cleaning apparatus and substrate cleaning method | Kazuya Dobashi | 2015-08-04 |
| 7554095 | Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate | Tadashi Kotsugi, Kyo Tsuboi, Koji Takeya | 2009-06-30 |
| 7550739 | Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate | Tadashi Kotsugi, Kyo Tsuboi, Koji Takeya | 2009-06-23 |
| 7521687 | Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate | Tadashi Kotsugi, Kyo Tsuboi, Koji Takeya | 2009-04-21 |
| 7507673 | Method for etching an object to be processed | Kiwamu Fujimoto, Tomoyo Yamaguchi | 2009-03-24 |
| 7473377 | Plasma processing method | Tomoyo Yamaguchi, Kiwamu Fujimoto, Masanobu Honda, Kazuya Nagaseki, Akiteru Koh +3 more | 2009-01-06 |
| 7443516 | Optical-distortion correcting apparatus and optical-distortion correcting method | Fumiyuki Takahashi, Hiroyuki Tsukahara | 2008-10-28 |
| 7432207 | Method for etching object to be processed | Kiwamu Fujimoto, Tomoyo Yamaguchi | 2008-10-07 |
| 7381653 | Plasma processing method | — | 2008-06-03 |
| 7141510 | Plasma processing method | — | 2006-11-28 |
| 6914010 | Plasma etching method | Jae-Young Jeong, Kiwami Fujimoto | 2005-07-05 |
| 6555836 | Method and apparatus for inspecting bumps and determining height from a regular reflection region | Fumiyuki Takahashi, Hiroyuki Tsukahara, Yoshitaka Oshima, Youji Nishiyama | 2003-04-29 |
| 6104493 | Method and apparatus for visual inspection of bump array | Youji Nishiyama, Yoshitaka Oshima, Fumiyuki Takahashi, Hiroyuki Tsukahara | 2000-08-15 |
| 6052189 | Height measurement device and height measurement method | Hiroyuki Tsukahara, Yoshitaka Oshima, Youji Nishiyama, Fumiyuki Takahashi | 2000-04-18 |
| 5999266 | Method for inspecting height, and a height inspection apparatus to carry out the method | Fumiyuki Takahashi, Hiroyuki Tsukahara, Yoshitaka Oshima, Youji Nishiyama | 1999-12-07 |
| 5430468 | Image recording apparatus | Keizo Sasai, Takehiro Yoshida, Masakatsu Iwata, Makoto Kobayashi, Minoru Yokoyama +3 more | 1995-07-04 |