Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10937673 | Substrate processing apparatus, substrate processing method and recording medium | Toyohisa Tsuruda, Masato Hosaka | 2021-03-02 |
| 10600621 | Plasma electrode and plasma processing device | Masato Morishima, Katsuhiko Iwabuchi, Takashi Fuse, Daisuke Nishide | 2020-03-24 |