Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406350 | Estimation model creation device, estimation model creation method, and storage medium | Masato Hosaka | 2025-09-02 |
| 12300526 | Substrate processing control method, substrate processing apparatus and storage medium | Yoshitaka Konishi | 2025-05-13 |
| 12228390 | Information processing apparatus, information processing method and computer-readable recording medium | Masahide Tadokoro, Masashi Enomoto, Hiroshi Nakamura, Kazuhiro Shiba | 2025-02-18 |
| 12123778 | Thermal imaging sensor for integration into track system | Michael A. Carcasi, Kazuhiro Shiba, Masahide Tadokoro, Masashi Enomoto | 2024-10-22 |
| 12051189 | Estimation model creation device, estimation model creation method, and storage medium | Masato Hosaka | 2024-07-30 |
| 11876022 | Substrate treatment method and substrate treatment system | Masashi Enomoto, Hiroshi Nakamura | 2024-01-16 |
| 11862496 | Substrate processing control method, substrate processing apparatus and storage medium | Yoshitaka Konishi | 2024-01-02 |
| 11703459 | System and method to calibrate a plurality of wafer inspection system (WIS) modules | Michael A. Carcasi, Hiroyuki Iwaki, Masahide Tadokoro | 2023-07-18 |
| 11636579 | Information processing method, information processing apparatus and computer-readable recording medium | Masato Hosaka | 2023-04-25 |
| 11555691 | Substrate inspection system, substrate inspection method and recording medium | Hiroshi Nakamura, Yasuaki Noda | 2023-01-17 |
| 11544864 | Shape characteristic value estimation apparatus, shape characteristic value estimation method, and storage medium | Yusuke YODA, Masato Hosaka | 2023-01-03 |
| 11461885 | Substrate inspection method, substrate inspection system, and control apparatus | Hiroshi Tomita | 2022-10-04 |
| 10937673 | Substrate processing apparatus, substrate processing method and recording medium | Madoka Fujimoto, Masato Hosaka | 2021-03-02 |
| 10248030 | Process recipe evaluation method, storage medium, assisting device for process recipe evaluation, and liquid processing apparatus | Yuichiro KUNUGIMOTO, Takafumi Hayama, Keishi Hamada | 2019-04-02 |
| 10211050 | Method for photo-lithographic processing in semiconductor device manufacturing | Hidetami Yaegashi, Kenichi Oyama, Masatoshi Yamato, Tomohiro Iseki | 2019-02-19 |
| 10023477 | Treatment solution supply method, treatment solution supply apparatus, and non-transitory computer-readable recording medium | Masato Hayashi, Masayuki Kajiwara | 2018-07-17 |
| 8992687 | Substrate processing apparatus, method for processing substrate, and storage medium | Hiroyuki Kudoh, Hideto Mori, Shinji Okada | 2015-03-31 |
| 8801891 | Substrate warpage removal apparatus and substrate processing apparatus | — | 2014-08-12 |
| 8455183 | Resist pattern slimming treatment method | Yoshihiro Kondo, Atsushi Ookouchi, Masahiro Yamamoto | 2013-06-04 |