Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165848 | Substrate processing method, substrate processing apparatus, and method for producing nanowire or nanosheet transistor | Shohei Yamauchi, Kazuya Dobashi, Akitaka Shimizu | 2024-12-10 |
| 11694872 | Pattern enhancement using a gas cluster ion beam | Kazuya Dobashi, Hiromitsu Kambara, Masaru Nishino, Reo Kosaka, Matthew C. Gwinn +3 more | 2023-07-04 |
| 11450506 | Pattern enhancement using a gas cluster ion beam | Kazuya Dobashi, Hiromitsu Kambara, Masaru Nishino, Reo Kosaka, Matthew C. Gwinn +3 more | 2022-09-20 |
| 11444511 | Vibration damping device and electrically driven actuator | Yuki Morisaki, Yasuhiro SAIKI | 2022-09-13 |
| 10317797 | Pattern forming method for forming a pattern | Hidetami Yaegashi, Katsumi Ohmori, Yoshitaka Komuro, Takehiro Seshimo | 2019-06-11 |
| 10211050 | Method for photo-lithographic processing in semiconductor device manufacturing | Hidetami Yaegashi, Masatoshi Yamato, Tomohiro Iseki, Toyohisa Tsuruda | 2019-02-19 |
| 9459535 | Method of forming pattern | Naoto Motoike, Katsumi Ohmori, Toshiaki Hato, Hidetami Yaegashi | 2016-10-04 |
| 9418860 | Use of topography to direct assembly of block copolymers in grapho-epitaxial applications | Mark H. Somervell, Makoto Muramatsu, Benjamen M. Rathsack, Tadatoshi Tomita, Hisashi Genjima +1 more | 2016-08-16 |
| 9023225 | Pattern forming method | Hidetami Yaegashi | 2015-05-05 |
| 8687405 | Phase change memory and method for fabricating phase change memory | Hajime NAKABAYASHI, Yoshihiro Hirota | 2014-04-01 |
| 8383990 | Substrate transport apparatus and heat treatment apparatus | Akihiko Morita, Koji Nishi | 2013-02-26 |
| 7094994 | Heat treatment apparatus and method of semiconductor wafer | Atsushi Someya, Yuko Yamaguchi | 2006-08-22 |
| 6013552 | Method of manufacturing a split-gate flash memory cell | — | 2000-01-11 |
| 5929479 | Floating gate type non-volatile semiconductor memory for storing multi-value information | — | 1999-07-27 |
| 5691552 | Nonvolatile semiconductor memory formed with silicon-on-insulator structure | — | 1997-11-25 |
| 5327385 | Method of erasure for a non-volatile semiconductor memory device | — | 1994-07-05 |